Vol: 9, Issue: 2 2019

Page: 22-31

Energy Performance of Cleanroom Facility

Kovid Sharma, Dr Pardeep Kumar Mishra

Received Date: 2019-03-25

Accepted Date: 2019-04-04

Published Date: 2019-04-25

The evaluation of overall energy utility and performance of clean room facilities has become necessary due to by rapid growth of clean room facility in India. This paper intends to gives a peak into evaluating energy usage viz-a-viz optimal performance opportunities through improvement in energy efficiency. In Comparisons with IEST recommended practice are made to examine the performance of cleanroom air systems. These results can serve as a step -up to identify efficient cleanroom design practices in term of energy usage and relevant issues in cleanroom operation and maintenance. Results from this study shows that there are opportunities to improve energy efficiency of clean room environment systems while maintaining effective contamination control.

References

• ISO 1999. Cleanrooms and associated controlled environments. Part 1% Classification of air cleanliness. ISO Standard 14644-1, 999. The Institute of Environmental Sciences and technology (IEST), 940 East Northwest Highway, Mount Prospect, Illinois 60056-3422, USA.
• ISO. 2000. Cleanrooms and associated controlled environments. Pat 2 % Testing and monitoring to prove continued compliance to ISO 14644-1. ISO Standard 14544-2, 2000. The Institute of Environmental Sciences and technology (IEST), 940 East Northwest Highway, Mount Prospect, Illinois 60056-3422, USA.
• E. Mills, G. Bell, D. Sartor, A. Chen, Dl. Avery, M. Siminovitch, S. Greenberg, Gl. Marton, A. De almeida, and L.E. Lock. 1996. Energy Efficiency in California Laboratory Type Facilities. Lawrence Berkeley National Laboratory Report, LBNL-39061.
• Whyte, W. 1999. Cleanroom Design, 2nd Edition. John Wiley & Sons, Baffins Lane, Chichester, West susses, England. ISBN 0-471-94204-9.
• Sartor, D., M.A. piette, w. Tschudi, and S. Fok. 2000. Strategies for Energy Benchmarking in Cleanrroms and Laboratory-Type Facilities, Proceedings of the ACEEE 2000 Summer Study on Energy Efficiency in Buildings, CA. August 2000. LBNL-45928.
• Tschudi, W., K. Benschine, S. Fok, and P. Rumsey. 2001. Cleanroom Energy Benchmarking in High-Tech and biotech Industries. Proceedings of American Council for an Energy Efficient Economy (ACEEE) Summer Study on Energy Efficiency in Industry, Increase Productivity through Energy Efficiency, Vol. 1 % 209-220, NY. June 2�1.
• The Institute of Environmental Sciences and technology (IEST). 1993. Considerations in Cleanroom Design. IEST Recommended Practice 013.1 (IEST-RP-CC012.1). the Institute of Environmental Sciences and Technology, 940 East Northwest Highway, Mount Prospect, Illinois 60056-3422,USA.
• Federal Standard 209E. 1992. 1992. Airborne Particulate Cleanliness Classes in cleanrroms and Clean Zones. General Services Administration (GSA), GSA Service Centre, seventh & D Street, SW, Washington DC, USA. This standard has been superseded, starting on November 29, 2001, by International Organization for standardization (ISO) Standards for Cleanrooms and associated controlled environments, ISO 14644-1 & 2[1,2].
• Grout, R. 2001. Air Management. CleanRooms. Penn Well corporation, March 2001.
• Galat witsch ,S. 2001. When fan filter units are the right call, CleanRoom. Penn Well corporation, January 2001.
• ASHRAE. 1995. ASHRAE Handbook: HVAC Application, American Society of Hearing, Refrigerating and Ari conditioning Engineers, Inc., Atlanta, GA.
• Schneider, R. 2001. Designing Clean Room HVAC Systems. ASHRAE Journal, Vol. 43(8):39- 46. August 2001.